Xuanyu Huang, Rui Zhang, Yu Huang, Peiyao Wang, Mei Li. Enhancements of Model and Method in Lithography Hotspot Identification. In Design, Automation & Test in Europe Conference & Exhibition, DATE 2021, Grenoble, France, February 1-5, 2021. pages 102-107, IEEE, 2021. [doi]
Abstract is missing.