Rimon Ikeno, Takashi Maruyama, Tetsuya Iizuka, Satoshi Komatsu, Makoto Ikeda, Kunihiro Asada. High-throughput electron beam direct writing of VIA layers by character projection using character sets based on one-dimensional VIA arrays with area-efficient stencil design. In 18th Asia and South Pacific Design Automation Conference, ASP-DAC 2013, Yokohama, Japan, January 22-25, 2013. pages 255-260, IEEE, 2013. [doi]
Abstract is missing.