Rimon Ikeno, Takashi Maruyama, Satoshi Komatsu, Tetsuya Iizuka, Makoto Ikeda, Kunihiro Asada. A structured routing architecture and its design methodology suitable for high-throughput electron beam direct writing with character projection. In Cheng-Kok Koh, Cliff C. N. Sze, editors, International Symposium on Physical Design, ISPD'13, Stateline, NV, USA, March 24-27, 2013. pages 69-76, ACM, 2013. [doi]
Abstract is missing.