A volume diagnosis method for identifying systematic faults in lower-yield wafer occurring during mass production

Tsutomu Ishida, Izumi Nitta, Koji Banno, Yuzi Kanazawa. A volume diagnosis method for identifying systematic faults in lower-yield wafer occurring during mass production. In 19th Asia and South Pacific Design Automation Conference, ASP-DAC 2014, Singapore, January 20-23, 2014. pages 670-675, IEEE, 2014. [doi]

Authors

Tsutomu Ishida

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Izumi Nitta

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Koji Banno

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Yuzi Kanazawa

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