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Thermal stability of ALD-grown SiO2 and Al2O3 on (010) β-Ga2O3 substrates

A. E. Islam, A. Miesle, M. Dietz, Kevin D. Leedy, S. Ganguli, G. Subramanyam, W. Wang, N. Sepelak, D. Dryden, Stephen E. Tetlak, Kyle J. Liddy, Andrew J. Green, Kelson D. Chabak. Thermal stability of ALD-grown SiO2 and Al2O3 on (010) β-Ga2O3 substrates. In Device Research Conference, DRC 2022, Columbus, OH, USA, June 26-29, 2022. pages 1-2, IEEE, 2022. [doi]

Authors

A. E. Islam

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A. Miesle

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M. Dietz

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Kevin D. Leedy

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S. Ganguli

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G. Subramanyam

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W. Wang

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N. Sepelak

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D. Dryden

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Stephen E. Tetlak

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Kyle J. Liddy

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Andrew J. Green

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Kelson D. Chabak

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