A. E. Islam, A. Miesle, M. Dietz, Kevin D. Leedy, S. Ganguli, G. Subramanyam, W. Wang, N. Sepelak, D. Dryden, Stephen E. Tetlak, Kyle J. Liddy, Andrew J. Green, Kelson D. Chabak. Thermal stability of ALD-grown SiO2 and Al2O3 on (010) β-Ga2O3 substrates. In Device Research Conference, DRC 2022, Columbus, OH, USA, June 26-29, 2022. pages 1-2, IEEE, 2022. [doi]
@inproceedings{IslamMDLGSWSDTL22,
title = {Thermal stability of ALD-grown SiO2 and Al2O3 on (010) β-Ga2O3 substrates},
author = {A. E. Islam and A. Miesle and M. Dietz and Kevin D. Leedy and S. Ganguli and G. Subramanyam and W. Wang and N. Sepelak and D. Dryden and Stephen E. Tetlak and Kyle J. Liddy and Andrew J. Green and Kelson D. Chabak},
year = {2022},
doi = {10.1109/DRC55272.2022.9855795},
url = {https://doi.org/10.1109/DRC55272.2022.9855795},
researchr = {https://researchr.org/publication/IslamMDLGSWSDTL22},
cites = {0},
citedby = {0},
pages = {1-2},
booktitle = {Device Research Conference, DRC 2022, Columbus, OH, USA, June 26-29, 2022},
publisher = {IEEE},
isbn = {978-1-6654-9883-8},
}