Shinya Ito, Hiroaki Namba, Tsuyoshi Hirata, Koichi Ando, Shin Koyama, Nobuyuki Ikezawa, Tatsuya Suzuki, Takehiro Saitoh, Tadahiko Horiuchi. Effect of mechanical stress induced by etch-stop nitride: impact on deep-submicron transistor performance. Microelectronics Reliability, 42(2):201-209, 2002. [doi]
Abstract is missing.