BISTs for post-bond test and electrical analysis of high density 3D interconnect defects

Imed Jani, Didier Lattard, Pascal Vivet, Lucile Arnaud, Edith Beigné. BISTs for post-bond test and electrical analysis of high density 3D interconnect defects. In 23rd IEEE European Test Symposium, ETS 2018, Bremen, Germany, May 28 - June 1, 2018. pages 1-6, IEEE, 2018. [doi]

Abstract

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