Effect of Back Gate on Word Line Disturb Immunity of a Vertical Channel DRAM Cell Array Transistor

Moonyoung Jeong, Sangho Lee, Yootak Jun, Kiseok Lee, Seokhan Park, Jeonghoon Oh, Ilgweon Kim, Jemin Park. Effect of Back Gate on Word Line Disturb Immunity of a Vertical Channel DRAM Cell Array Transistor. In IEEE International Reliability Physics Symposium, IRPS 2024, Grapevine, TX, USA, April 14-18, 2024. pages 23, IEEE, 2024. [doi]

Abstract

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