Efficient heterogeneous integration of InP/Si and GaSb/Si templates with ultra-smooth surfaces

Tingting Jin, Jiajie Lin, Tiangui You, Xiaolei Zhang, Hao Liang, Yifan Zhu, Jialiang Sun, Hangning Shi, Chaodan Chi, Min Zhou, Robert Kudrawiec, Shumin Wang, Xin Ou. Efficient heterogeneous integration of InP/Si and GaSb/Si templates with ultra-smooth surfaces. Science in China Series F: Information Sciences, 65(8):1-9, 2022. [doi]

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