Reliability of amorphous InGaZnO TFTs with ITO local conducting buried layer for BEOL power transistors

Hyun Jong Kim, Byung Sang Song, Won-Ju Cho, Jong-Tae Park. Reliability of amorphous InGaZnO TFTs with ITO local conducting buried layer for BEOL power transistors. Microelectronics Reliability, 76:333-337, 2017. [doi]

Authors

Hyun Jong Kim

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Byung Sang Song

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Won-Ju Cho

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Jong-Tae Park

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