Reliability of amorphous InGaZnO TFTs with ITO local conducting buried layer for BEOL power transistors

Hyun Jong Kim, Byung Sang Song, Won-Ju Cho, Jong-Tae Park. Reliability of amorphous InGaZnO TFTs with ITO local conducting buried layer for BEOL power transistors. Microelectronics Reliability, 76:333-337, 2017. [doi]

@article{KimSCP17,
  title = {Reliability of amorphous InGaZnO TFTs with ITO local conducting buried layer for BEOL power transistors},
  author = {Hyun Jong Kim and Byung Sang Song and Won-Ju Cho and Jong-Tae Park},
  year = {2017},
  doi = {10.1016/j.microrel.2017.06.023},
  url = {https://doi.org/10.1016/j.microrel.2017.06.023},
  researchr = {https://researchr.org/publication/KimSCP17},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {76},
  pages = {333-337},
}