Reliability of amorphous InGaZnO TFTs with ITO local conducting buried layer for BEOL power transistors

Hyun Jong Kim, Byung Sang Song, Won-Ju Cho, Jong-Tae Park. Reliability of amorphous InGaZnO TFTs with ITO local conducting buried layer for BEOL power transistors. Microelectronics Reliability, 76:333-337, 2017. [doi]

Abstract

Abstract is missing.