3D-integration of silicon devices: A key technology for sophisticated products

Armin Klumpp, Peter Ramm, R. Wieland. 3D-integration of silicon devices: A key technology for sophisticated products. In Design, Automation and Test in Europe, DATE 2010, Dresden, Germany, March 8-12, 2010. pages 1678-1683, IEEE, 2010. [doi]

Abstract

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