Back-end-of-line CMOS-compatible diode fabrication with pure boron deposition down to 50 °C - researchr publication authors

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Tihomir Knezevic, Tomislav Suligoj, Xingyu Liu, Lis K. Nanver, Ahmed ElSayed, Jan F. Dick, Jörg Schulze. Back-end-of-line CMOS-compatible diode fabrication with pure boron deposition down to 50 °C. In 49th European Solid-State Device Research Conference, ESSDERC 2019, Cracow, Poland, September 23-26, 2019. pages 242-245, IEEE, 2019. [doi]

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