Jung-Soo Ko, Zichen Zhang, Sol Lee, Marc Jaikissoon, Robert K. A. Bennett, Kwanpyo Kim, Andrew C. Kummel, Prabhakar Bandaru, Eric Pop, Krishna C. Saraswat. Ultrathin Gate Dielectric Enabled by Nanofog Aluminum Oxide on Monolayer MoS2. In 53rd IEEE European Solid-State Device Research Conference, ESSDERC 2023, Lisbon, Portugal, September 11-14, 2023. pages 1-4, IEEE, 2023. [doi]
Abstract is missing.