Manufacturability-aware mask assignment in multiple patterning lithography - researchr publication authors

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Yukihide Kohira, Atsushi Takahashi 0001, Tomomi Matsui, Chikaaki Kodama, Shigeki Nojima, Satoshi Tanaka. Manufacturability-aware mask assignment in multiple patterning lithography. In 2016 IEEE Asia Pacific Conference on Circuits and Systems, APCCAS 2016, Jeju, South Korea, October 25-28, 2016. pages 538-541, IEEE, 2016. [doi]

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