Yukihide Kohira, Atsushi Takahashi 0001, Tomomi Matsui, Chikaaki Kodama, Shigeki Nojima, Satoshi Tanaka. Manufacturability-aware mask assignment in multiple patterning lithography. In 2016 IEEE Asia Pacific Conference on Circuits and Systems, APCCAS 2016, Jeju, South Korea, October 25-28, 2016. pages 538-541, IEEE, 2016. [doi]
@inproceedings{Kohira0MKNT16,
title = {Manufacturability-aware mask assignment in multiple patterning lithography},
author = {Yukihide Kohira and Atsushi Takahashi 0001 and Tomomi Matsui and Chikaaki Kodama and Shigeki Nojima and Satoshi Tanaka},
year = {2016},
doi = {10.1109/APCCAS.2016.7804023},
url = {http://dx.doi.org/10.1109/APCCAS.2016.7804023},
researchr = {https://researchr.org/publication/Kohira0MKNT16},
cites = {0},
citedby = {0},
pages = {538-541},
booktitle = {2016 IEEE Asia Pacific Conference on Circuits and Systems, APCCAS 2016, Jeju, South Korea, October 25-28, 2016},
publisher = {IEEE},
isbn = {978-1-5090-1570-2},
}