Analysis of electromigration-induced backflow stresses in Cu(Mn) interconnects using high statistical sampling

M. Kraatz, Christoph Sander, André Clausner, M. Hauschildt, Yvonne Standke, Martin Gall, Ehrenfried Zschech. Analysis of electromigration-induced backflow stresses in Cu(Mn) interconnects using high statistical sampling. In IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018. pages 4, IEEE, 2018. [doi]

Abstract

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