Systematic Defects in Deep Sub-Micron Technologies

Bram Kruseman, Ananta K. Majhi, Camelia Hora, Stefan Eichenberger, Johan Meirlevede. Systematic Defects in Deep Sub-Micron Technologies. In Proceedings 2004 International Test Conference (ITC 2004), October 26-28, 2004, Charlotte, NC, USA. pages 290-299, IEEE, 2004. [doi]

Abstract

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