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Influence of substrate temperature to prepare (1 0 3) oriented AlN films

Maw-Shung Lee, Sean Wu, Shih-Bin Jhong, Kuan-Ting Liu, Ruyen Ro, Chia-Chi Shih, Zhi-Xun Lin, Kang-I. Chen, Shou-Chang Cheng. Influence of substrate temperature to prepare (1 0 3) oriented AlN films. In Microelectronics Reliability. pages 1984-1987, 2010. [doi]

Authors

Maw-Shung Lee

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Sean Wu

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Shih-Bin Jhong

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Kuan-Ting Liu

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Ruyen Ro

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Chia-Chi Shih

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Zhi-Xun Lin

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Kang-I. Chen

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Shou-Chang Cheng

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