Maw-Shung Lee, Sean Wu, Shih-Bin Jhong, Kuan-Ting Liu, Ruyen Ro, Chia-Chi Shih, Zhi-Xun Lin, Kang-I. Chen, Shou-Chang Cheng. Influence of substrate temperature to prepare (1 0 3) oriented AlN films. In Microelectronics Reliability. pages 1984-1987, 2010. [doi]
No reviews for this publication, yet.