Maw-Shung Lee, Sean Wu, Shih-Bin Jhong, Kuan-Ting Liu, Ruyen Ro, Chia-Chi Shih, Zhi-Xun Lin, Kang-I. Chen, Shou-Chang Cheng. Influence of substrate temperature to prepare (1 0 3) oriented AlN films. In Microelectronics Reliability. pages 1984-1987, 2010. [doi]
@inproceedings{LeeWJLRSLCC10,
title = {Influence of substrate temperature to prepare (1 0 3) oriented AlN films},
author = {Maw-Shung Lee and Sean Wu and Shih-Bin Jhong and Kuan-Ting Liu and Ruyen Ro and Chia-Chi Shih and Zhi-Xun Lin and Kang-I. Chen and Shou-Chang Cheng},
year = {2010},
doi = {10.1016/j.microrel.2010.06.010},
url = {http://dx.doi.org/10.1016/j.microrel.2010.06.010},
researchr = {https://researchr.org/publication/LeeWJLRSLCC10},
cites = {0},
citedby = {0},
pages = {1984-1987},
booktitle = {Microelectronics Reliability},
}