IR confocal laser microscopy for MEMS Technological Evaluation

Djemel Lellouchi, Felix Beaudoin, Christophe Le Touze, Philippe Perdu, Romain Desplats. IR confocal laser microscopy for MEMS Technological Evaluation. Microelectronics Reliability, 42(9-11):1815-1817, 2002. [doi]

Abstract

Abstract is missing.