Automatic Inspection for Wafer Defect Pattern Recognition with Unsupervised Clustering

Katherine Shu-Min Li, Leon Li-Yang Chen, Ken Chau-Cheung Cheng, Peter Yi-Yu Liao, Sying-Jyan Wang, Andrew Yi-Ann Huang, Nova Cheng-Yen Tsai, Leon Chou, Gus Chang-Hung Han, Jwu E. Chen, Hsing-Chung Liang, Chun-Lung Hsu. Automatic Inspection for Wafer Defect Pattern Recognition with Unsupervised Clustering. In 26th IEEE European Test Symposium, ETS 2021, Bruges, Belgium, May 24-28, 2021. pages 1-2, IEEE, 2021. [doi]

Authors

Katherine Shu-Min Li

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Leon Li-Yang Chen

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Ken Chau-Cheung Cheng

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Peter Yi-Yu Liao

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Sying-Jyan Wang

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Andrew Yi-Ann Huang

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Nova Cheng-Yen Tsai

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Leon Chou

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Gus Chang-Hung Han

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Jwu E. Chen

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Hsing-Chung Liang

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Chun-Lung Hsu

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