Katherine Shu-Min Li, Leon Li-Yang Chen, Ken Chau-Cheung Cheng, Peter Yi-Yu Liao, Sying-Jyan Wang, Andrew Yi-Ann Huang, Nova Cheng-Yen Tsai, Leon Chou, Gus Chang-Hung Han, Jwu E. Chen, Hsing-Chung Liang, Chun-Lung Hsu. Automatic Inspection for Wafer Defect Pattern Recognition with Unsupervised Clustering. In 26th IEEE European Test Symposium, ETS 2021, Bruges, Belgium, May 24-28, 2021. pages 1-2, IEEE, 2021. [doi]
Abstract is missing.