Self-Heating and Corner Rounding Effects on Time Dependent Dielectric Breakdown of Stacked Multi-Nanosheet FETs

Jae-Won Lim, Changhyun Yoo, Kiron Park, Jongwook Jeon. Self-Heating and Corner Rounding Effects on Time Dependent Dielectric Breakdown of Stacked Multi-Nanosheet FETs. IEEE Access, 11:82208-82215, 2023. [doi]

Abstract

Abstract is missing.