Effects of width scaling and layout variation on dual damascene copper interconnect electromigration

M. H. Lin, K. P. Chang, K. C. Su, Tahui Wang. Effects of width scaling and layout variation on dual damascene copper interconnect electromigration. Microelectronics Reliability, 47(12):2100-2108, 2007. [doi]

References

No references recorded for this publication.

Cited by

No citations of this publication recorded.