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m-Neighbor-TSP-Based Subfield Scheduling for Electron-Beam Photomask Fabrication

Zhi-Wen Lin, Shao-Yun Fang, Yao-Wen Chang, Wei-Cheng Rao, Chieh-Hsiung Kuan. m-Neighbor-TSP-Based Subfield Scheduling for Electron-Beam Photomask Fabrication. IEEE Trans. VLSI Syst., 26(2):378-391, 2018. [doi]

Authors

Zhi-Wen Lin

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Shao-Yun Fang

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Yao-Wen Chang

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Wei-Cheng Rao

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Chieh-Hsiung Kuan

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