Zhi-Wen Lin, Shao-Yun Fang, Yao-Wen Chang, Wei-Cheng Rao, Chieh-Hsiung Kuan. m-Neighbor-TSP-Based Subfield Scheduling for Electron-Beam Photomask Fabrication. IEEE Trans. VLSI Syst., 26(2):378-391, 2018. [doi]
@article{LinFCRK18,
title = {m-Neighbor-TSP-Based Subfield Scheduling for Electron-Beam Photomask Fabrication},
author = {Zhi-Wen Lin and Shao-Yun Fang and Yao-Wen Chang and Wei-Cheng Rao and Chieh-Hsiung Kuan},
year = {2018},
doi = {10.1109/TVLSI.2017.2761850},
url = {http://doi.ieeecomputersociety.org/10.1109/TVLSI.2017.2761850},
researchr = {https://researchr.org/publication/LinFCRK18},
cites = {0},
citedby = {0},
journal = {IEEE Trans. VLSI Syst.},
volume = {26},
number = {2},
pages = {378-391},
}