m-Neighbor-TSP-Based Subfield Scheduling for Electron-Beam Photomask Fabrication

Zhi-Wen Lin, Shao-Yun Fang, Yao-Wen Chang, Wei-Cheng Rao, Chieh-Hsiung Kuan. m-Neighbor-TSP-Based Subfield Scheduling for Electron-Beam Photomask Fabrication. IEEE Trans. VLSI Syst., 26(2):378-391, 2018. [doi]

Abstract

Abstract is missing.