External Links

Cite Key

Statistics

  • References: 0
  • Cited by: 0
  • Reviews: 0
  • Bibliographies: 0

PDF

Researchr

Researchr is a web site for finding, collecting, sharing, and reviewing scientific publications, for researchers by researchers.

Sign up for an account to create a profile with publication list, tag and review your related work, and share bibliographies with your co-authors.

ANOVA model based moving window approach for RtR control in high-mix semiconductor manufacturing industry

D. Ling, Y. Zheng, H. J. Fang, H. J. Fan, J. Zhao. ANOVA model based moving window approach for RtR control in high-mix semiconductor manufacturing industry. In European Control Conference, ECC 2013, Zurich, Switzerland, July 17-19, 2013. pages 3949-3954, IEEE, 2013. [doi]

Authors

D. Ling

This author has not been identified. Look up 'D. Ling' in Google

Y. Zheng

This author has not been identified. Look up 'Y. Zheng' in Google

H. J. Fang

This author has not been identified. Look up 'H. J. Fang' in Google

H. J. Fan

This author has not been identified. Look up 'H. J. Fan' in Google

J. Zhao

This author has not been identified. Look up 'J. Zhao' in Google
runs on