D. Ling, Y. Zheng, H. J. Fang, H. J. Fan, J. Zhao. ANOVA model based moving window approach for RtR control in high-mix semiconductor manufacturing industry. In European Control Conference, ECC 2013, Zurich, Switzerland, July 17-19, 2013. pages 3949-3954, IEEE, 2013. [doi]
@inproceedings{LingZFFZ13,
title = {ANOVA model based moving window approach for RtR control in high-mix semiconductor manufacturing industry},
author = {D. Ling and Y. Zheng and H. J. Fang and H. J. Fan and J. Zhao},
year = {2013},
url = {http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=6669239},
researchr = {https://researchr.org/publication/LingZFFZ13},
cites = {0},
citedby = {0},
pages = {3949-3954},
booktitle = {European Control Conference, ECC 2013, Zurich, Switzerland, July 17-19, 2013},
publisher = {IEEE},
}