ANOVA model based moving window approach for RtR control in high-mix semiconductor manufacturing industry

D. Ling, Y. Zheng, H. J. Fang, H. J. Fan, J. Zhao. ANOVA model based moving window approach for RtR control in high-mix semiconductor manufacturing industry. In European Control Conference, ECC 2013, Zurich, Switzerland, July 17-19, 2013. pages 3949-3954, IEEE, 2013. [doi]

Abstract

Abstract is missing.