An On-line Variable Speed Scanning Method with Machine Learning Based Feedforward Control for Atomic Force Microscopy

Yi-Lin Liu, Ching-Chi Huang, Huang-Chih Chen, Li-Chen Fu. An On-line Variable Speed Scanning Method with Machine Learning Based Feedforward Control for Atomic Force Microscopy. In 12th Asian Control Conference, ASCC 2019, Kitakyushu-shi, Japan, June 9-12, 2019. pages 138-143, IEEE, 2019. [doi]

Abstract

Abstract is missing.