A novel multi-direction high shock reliability test on MEMS devices

Wenzhong Lou, Renlong Song, Yunjian Liu, Xiaosong Liu, Weihua Li, Wanfeng Lin. A novel multi-direction high shock reliability test on MEMS devices. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 261-264, IEEE, 2009. [doi]

Abstract

Abstract is missing.