Fast Transistor Threshold Voltage Measurement Method for High-Speed, High-Accuracy Advanced Process Characterization

Tseng-Chin Luo, Mango Chia-Tso Chao, Huan-Chi Tseng, Masaharu Goto, Philip A. Fisher, Yuan-Yao Chang, Chi-Min Chang, Takayuki Takao, Katsuhito Iwasaki, Cheng Mao Lee. Fast Transistor Threshold Voltage Measurement Method for High-Speed, High-Accuracy Advanced Process Characterization. IEEE Trans. VLSI Syst., 22(5):1138-1149, 2014. [doi]

Authors

Tseng-Chin Luo

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Mango Chia-Tso Chao

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Huan-Chi Tseng

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Masaharu Goto

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Philip A. Fisher

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Yuan-Yao Chang

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Chi-Min Chang

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Takayuki Takao

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Katsuhito Iwasaki

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Cheng Mao Lee

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