Fast Transistor Threshold Voltage Measurement Method for High-Speed, High-Accuracy Advanced Process Characterization

Tseng-Chin Luo, Mango Chia-Tso Chao, Huan-Chi Tseng, Masaharu Goto, Philip A. Fisher, Yuan-Yao Chang, Chi-Min Chang, Takayuki Takao, Katsuhito Iwasaki, Cheng Mao Lee. Fast Transistor Threshold Voltage Measurement Method for High-Speed, High-Accuracy Advanced Process Characterization. IEEE Trans. VLSI Syst., 22(5):1138-1149, 2014. [doi]

Abstract

Abstract is missing.