Fast Transistor Threshold Voltage Measurement Method for High-Speed, High-Accuracy Advanced Process Characterization

Tseng-Chin Luo, Mango Chia-Tso Chao, Huan-Chi Tseng, Masaharu Goto, Philip A. Fisher, Yuan-Yao Chang, Chi-Min Chang, Takayuki Takao, Katsuhito Iwasaki, Cheng Mao Lee. Fast Transistor Threshold Voltage Measurement Method for High-Speed, High-Accuracy Advanced Process Characterization. IEEE Trans. VLSI Syst., 22(5):1138-1149, 2014. [doi]

@article{LuoCTGFCCTIL14,
  title = {Fast Transistor Threshold Voltage Measurement Method for High-Speed, High-Accuracy Advanced Process Characterization},
  author = {Tseng-Chin Luo and Mango Chia-Tso Chao and Huan-Chi Tseng and Masaharu Goto and Philip A. Fisher and Yuan-Yao Chang and Chi-Min Chang and Takayuki Takao and Katsuhito Iwasaki and Cheng Mao Lee},
  year = {2014},
  doi = {10.1109/TVLSI.2013.2265299},
  url = {http://dx.doi.org/10.1109/TVLSI.2013.2265299},
  researchr = {https://researchr.org/publication/LuoCTGFCCTIL14},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. VLSI Syst.},
  volume = {22},
  number = {5},
  pages = {1138-1149},
}