Passivity-Based Control of Electrostatic MEMS in the Presence of Parasitics

D. H. S. Maithripala, Balasaheb D. Kawade, Jordan M. Berg, Wijesuriya P. Dayawansa. Passivity-Based Control of Electrostatic MEMS in the Presence of Parasitics. In 45th IEEE Conference on Decision and Control, CDC 2006, San Diego, CA, USA, 13-15 December, 2006. pages 615-620, IEEE, 2006. [doi]

Abstract

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