Design and control of a single-chip SOI-MEMS atomic force microscope - researchr publication authors

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Mohammad Maroufi, Michael G. Ruppert, Anthony G. Fowler, S. O. Reza Moheimani. Design and control of a single-chip SOI-MEMS atomic force microscope. In 2017 American Control Conference, ACC 2017, Seattle, WA, USA, May 24-26, 2017. pages 2869-2874, IEEE, 2017. [doi]

This author has not been identified. Look up 'Mohammad Maroufi' in GoogleThis author has not been identified. Look up 'Michael G. Ruppert' in GoogleThis author has not been identified. Look up 'Anthony G. Fowler' in GoogleThis author has not been identified. Look up 'S. O. Reza Moheimani' in Google

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