Mohammad Maroufi, Michael G. Ruppert, Anthony G. Fowler, S. O. Reza Moheimani. Design and control of a single-chip SOI-MEMS atomic force microscope. In 2017 American Control Conference, ACC 2017, Seattle, WA, USA, May 24-26, 2017. pages 2869-2874, IEEE, 2017. [doi]
@inproceedings{MaroufiRFM17,
title = {Design and control of a single-chip SOI-MEMS atomic force microscope},
author = {Mohammad Maroufi and Michael G. Ruppert and Anthony G. Fowler and S. O. Reza Moheimani},
year = {2017},
doi = {10.23919/ACC.2017.7963386},
url = {https://doi.org/10.23919/ACC.2017.7963386},
researchr = {https://researchr.org/publication/MaroufiRFM17},
cites = {0},
citedby = {0},
pages = {2869-2874},
booktitle = {2017 American Control Conference, ACC 2017, Seattle, WA, USA, May 24-26, 2017},
publisher = {IEEE},
isbn = {978-1-5090-5992-8},
}