Mohammad Maroufi, Michael G. Ruppert, Anthony G. Fowler, S. O. Reza Moheimani. Design and control of a single-chip SOI-MEMS atomic force microscope. In 2017 American Control Conference, ACC 2017, Seattle, WA, USA, May 24-26, 2017. pages 2869-2874, IEEE, 2017. [doi]
Abstract is missing.