Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements

Javier Martínez, David Asiain, José Ramón Beltrán. Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements. Sensors, 21(9):3117, 2021. [doi]

Authors

Javier Martínez

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David Asiain

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José Ramón Beltrán

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