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Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements

Javier Martínez, David Asiain, José Ramón Beltrán. Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements. Sensors, 21(9):3117, 2021. [doi]

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