Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements

Javier Martínez, David Asiain, José Ramón Beltrán. Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements. Sensors, 21(9):3117, 2021. [doi]

@article{MartinezAB21,
  title = {Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements},
  author = {Javier Martínez and David Asiain and José Ramón Beltrán},
  year = {2021},
  doi = {10.3390/s21093117},
  url = {https://doi.org/10.3390/s21093117},
  researchr = {https://researchr.org/publication/MartinezAB21},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {21},
  number = {9},
  pages = {3117},
}