Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements

Javier Martínez, David Asiain, José Ramón Beltrán. Lightweight Thermal Compensation Technique for MEMS Capacitive Accelerometer Oriented to Quasi-Static Measurements. Sensors, 21(9):3117, 2021. [doi]

Abstract

Abstract is missing.