A CMOS-MEMS cantilever sensor for capnometric applications

Asif Mirza, Nor Hisham Hamid, Mohd Haris M. Khir, John Ojur Dennis, Khalid Ashraf, Muhammad Shoaib, Mohammad Tariq Jan. A CMOS-MEMS cantilever sensor for capnometric applications. IEICE Electronic Express, 11(9):20140113, 2014. [doi]

Authors

Asif Mirza

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Nor Hisham Hamid

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Mohd Haris M. Khir

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John Ojur Dennis

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Khalid Ashraf

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Muhammad Shoaib

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Mohammad Tariq Jan

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