A CMOS-MEMS cantilever sensor for capnometric applications

Asif Mirza, Nor Hisham Hamid, Mohd Haris M. Khir, John Ojur Dennis, Khalid Ashraf, Muhammad Shoaib, Mohammad Tariq Jan. A CMOS-MEMS cantilever sensor for capnometric applications. IEICE Electronic Express, 11(9):20140113, 2014. [doi]

Abstract

Abstract is missing.