A CMOS-MEMS cantilever sensor for capnometric applications

Asif Mirza, Nor Hisham Hamid, Mohd Haris M. Khir, John Ojur Dennis, Khalid Ashraf, Muhammad Shoaib, Mohammad Tariq Jan. A CMOS-MEMS cantilever sensor for capnometric applications. IEICE Electronic Express, 11(9):20140113, 2014. [doi]

@article{MirzaHKDASJ14,
  title = {A CMOS-MEMS cantilever sensor for capnometric applications},
  author = {Asif Mirza and Nor Hisham Hamid and Mohd Haris M. Khir and John Ojur Dennis and Khalid Ashraf and Muhammad Shoaib and Mohammad Tariq Jan},
  year = {2014},
  doi = {10.1587/elex.11.20140113},
  url = {http://dx.doi.org/10.1587/elex.11.20140113},
  researchr = {https://researchr.org/publication/MirzaHKDASJ14},
  cites = {0},
  citedby = {0},
  journal = {IEICE Electronic Express},
  volume = {11},
  number = {9},
  pages = {20140113},
}